Yunkai Luo
Process Engineer at Lam Research | Ph.D. in Materials Science and Engineering @UCLA
- Role
- Process Engineer - Analytical Metrology at Lam Research
- Location
- Fremont, CA, US
- LinkedIn followers
- 500 followers
Experience
Process Engineer - Analytical Metrology
Mar 2024 — Present · Fremont, CA, US
Conducted XPS quantitative surface analysis with technical report delivery by providing chemical bonding information, sophisticated peak deconvolution, depth profiling, and thickness modelling, to support process development/optimization and root cause investigation. • Developed FTIR quantification statistical models for enabling ultra-precise thin film composition measurement with <0.1% variability and excellent confidence limit <1nm.• Developed in-situ ATR FTIR measurement by designing optical pathlengths and optimizing optics alignment to understand deposition/cleaning process mechanism for supporting the development of a greener chamber cleaning process.• Lead in-situ gas phase FTIR for gas analysis by quantifying process gas utilization and byproducts concentration from complex gas mixtures during the process with plasma on.• Improved data analysis process by developing Python scripts and boosted the large quantity data processing efficiency for in-situ measurement. • Collaborated with a cross-functional team: participated in failure analysis, supported customer escalation, managed metrology equipment, and provided training to junior engineers.
Education
UCLA
Doctor of Philosophy - PhD, Materials Science and Engineering
University of California, Berkeley
Master of Engineering - MEng, Materials Science and Engineering
2017 — 2018
Xiamen University
Bachelor's degree, Economics
2013 — 2017
Xiamen University
Bachelor of Engineering - BE , Materials Science and Engineering
2013 — 2017
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