Yee Rui Koh

Role
Sr Design Engineer at ASML
Location
Sunnyvale, CA, US
LinkedIn followers
500 followers

About Yee Rui Koh

As an engineer in the semiconductor industry, I am driven by a passion for continuous…

Experience

  1. Sr Design Engineer

    ASML

    Jan 2021 — Present

    June 2022 to current • Functional owner of wafer alignment to ensure wafer loading accuracy in the high vacuum chamber, responsible to lead the mechanical, electrical, optical, software and firmware groups to fulfill specs. • Involved in system setup metrology on the multibeam SEM system • Worked in escalation team to troubleshoot and problems solving for both in-house and customer side pilots, provided containment or solutions for critical/long term issues. Jan 2021 to June 2022 • Designed the optical sensing modules and electrical/control hub to control the high-precision stage in the single- and multi-beam SEM system. • Hands-on experience in installing, maintaining, calibrating, and characterizing the different optical sensors on SEM column. • Worked with multidisciplinary groups (EE, FW, SW, IE, SEM etc.), vendors, and suppliers. • Leaded in the modules releasing, leaded and trained contractors and outsourcing team, maintained/wrote engineering documents, e.g. EDS, EPS, TAS, TAR, TPDs, and ACPDs.

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Yee Rui Koh — Sr Design Engineer at ASML in Sunnyvale, CA, US | Unifers