Yawei Chen
Senior Research Scientist @KLA
Ann Arbor, MI, US
EMAILS
MOBILE NUMBERS
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WORK HISTORY
May 2024 — Present
Senior Research Scientist @KLA
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Ann Arbor, MI, US
Fluid modeling of KLA inspection and metrology tools- Warped wafer chucking solution development- Laser sustained plasmas lamphouse cooling design.
EDUCATION
N/A
University of Michigan
Doctor of Philosophy (PhD), Mechanical Engineering
N/A
University of Science and Technology of China
Bachelor of Science (B.S.), Mechanical Engineering
SKILLS
Heat TransferAutocadPowder X-Ray DiffractionFdsLabviewFortranGc-MsMatlabFluentPythonLatexFtir
ABOUT YAWEI CHEN
Senior Research Scientist at KLA
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