Xitong Chen

Staff Process Engineer @ Lam Research | PhD in Chemistry

Role
Staff Process Engineer at Lam Research
Location
Fremont, CA, US
LinkedIn followers
500 followers

About Xitong Chen

7+ years of hands-on experience and broad knowledge in microfabrication and process development, including thin films deposition, reactive ion etching and materials characterization.Extensive hands-on experience in the troubleshooting, maintenance and setup of instruments and tools.Expertise in statistical data analysis and problem solving skills.Solid chemistry, experiment methodology, and measurement background combined with analytical and problem-solving strengths result in expansion of scientific knowledge and problem troubleshooting.Close collaboration with cross functional teams such as mechanical, software, electrical and foundry to co-develop process, troubleshoot various tool/equipment issues and ramp up productivity from NPI to HVM.Process Development / Thin Film Deposition / Reactive Ion EtchingStatistical Data Analysis / Tool/Equipment Startup and Troubleshooting / Productivity Ramp up

Experience

  1. Staff Process Engineer

    Lam Research

    Feb 2025 — Present · Fremont, CA, US

    Led process engineering research and development for ALD/CVD metallization, focusing on advanced technology nodes.• Collaborated with cross-functional teams to develop next-generation semiconductor tools.• Supported process transfer to high volume manufacturing, enhancing throughput and defect improvement.

Education

  • Nankai University

    Bachelor's degree, Chemistry

    2008 — 2012

  • University of California, Riverside

    Doctor of Philosophy - PhD, Chemistry

    2012 — 2017

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Xitong Chen — Staff Process Engineer at Lam Research in Fremont, CA, US | Unifers