Xingtian Tao

Sr Sem Mechanical Architect @ASML

San Jose, CA, US

ASML next generation SEM– Column Owner Lead the delivery of SEM system: Led a team of engineers for column feasibility studyServed as the primary interface between SEM and CP team to define the mechanical, HV, vacuum, thermal, dynamics interfaces and specs. ePXX (ASML metrology SEM tool) – Column Owner ·Identified the root cause of column aperture inaccuracy and developed an end-to-end solution that improved the accuracy to within 0.2 µm.·Led the aperture heating project to resolve long-standing aperture contamination issues.(Patent) ·Developed an algorithm to automatically calculate the amp-turns for magnetic lens system based on the geometry, improved the efficiency of the design from hours to less than 1 minute. High Landing & High Landing PEP – Mechanical Architect ·Led the objective lens thermal instability investigation: analyzed the data, designed the experiment to confirm the root cause; used COMSOL and Simulink to build a thermal model. Found the failure mode, provided mitigation plan for a short-term solution, and gave guidelines to designers to make a proper design for the long-term solution. ·Developed algorithms to quantify ghost image problems. This algorithm has been stored in HMI’s image quality KPI package. ·Developed an image-processing-based method to calibrate the test setup for condenser lens magnetic field measurement. Coached colleagues in Beijing to implement the code and correlate the result with experiment data to tune the experiment.

The University of Kansas

Doctor of Philosophy (PhD), Aerospace, Aeronautical and Astronautical Engineering

Northwestern Polytechnical University

Bachelor of Science (B.S.), Thermal Energy and Powering Engineering

University of Southern California

Master of Science (M.S.), Mechanical Engineering