Shengqiang Huang

About Shengqiang Huang

Motivated research professional with a Ph.D. in physics having strong ability to…

Experience

1. Sr Design Engineer-electron Optics

   ASML

   Feb 2019 — Present

   I am currently an electron optics design engineer at ASML, focusing on design and simulation of electron optical systems for semiconductor inspection and metrology on the nanometer level. • Develop new concepts and functionalities of multi-beam Scanning Electron Microscopy (SEM) machines according to system performance requirements, and convert them to real mechanical designs after verification through simulations. • Construct advanced theoretical models by Munro’s Electron Beam Software to simulate physical field profiles of components in the SEM system, including electron source, E&M deflectors, E&M lenses (multipoles), Wien filters, etc. • Simulate electron optics performance of the main and secondary columns in the SEM system to optimize and finalize the product design, including aberration calculation, resolution estimation, image quality analysis, mechanical and electrical tolerance evaluation, etc. • Design algorithms to find the best imaging condition for individual electron optical elements in the SEM system including deflection, focus and astigmatism. • Create python scripts to automatically execute simulations of electron trajectories and beam performance in the SEM system, obtain valuable estimation of the system\'s resolution and electron collection efficiency. • Conduct cutting edge research on electron and optical inspection and metrology, keeping our SEM tools innovative and competitive in the application market.