Samhitha Kancharla
TD Etch Module Engineer at Intel Corporation
- Role
- Td Etch Module Engineer at Intel
- Location
- Hillsboro, OR, US
- LinkedIn followers
- 500 followers
About Samhitha Kancharla
Process Engineer with hands on experience in semiconductor fabrication and process…
Experience
Td Etch Module Engineer
Mar 2022 — Present · Hillsboro, OR, US
Driving next generation process technology development & integration of backside contacts and power delivery for Intel 18A, 14A and beyond technologies. Developed and optimized plasma dry etch processes for capacitor and interconnect segments in high-bandwidth, low-power novel Adamantine (ADM) Memory technology, driving significant yield improvements, enhanced ADM capacitor performance, and getting next-gen process line introduction readiness resulting in multiple Intel LTD Divisional Awards. Led the qualification of multiple interconnect and capacitor segment process layers on 14nm and 10nm toolsets to meet production requirements in the dry etch module, resulting in a 2x increase in capacity and mitigating production lines down. Developed CD-SEM recipes for multiple back-end layers to enable accurate measurement of critical dimension (CD), local CD uniformity, structure-to-structure variation, and CD-to-cell height correlation. Enabled detailed etch process characterization, leading to improved process control, reduced within-wafer CD variation, and enhanced process reliability. Established and implemented process control systems for the process module, ensuring tool sustainability in high-volume manufacturing. Collaborated with cross-functional teams to integrate new materials and technologies into existing processes. Utilized statistical process control (SPC) tools to monitor process stability, identifying areas for continuous improvement and driving corrective actions. Equipment troubleshooting, drive root cause findings, CAPA (Corrective and Preventive Action) analysis and implemented hardware fixes to prevent future impact.
Education
Indian Institute of Technology, Guwahati
Bachelor of Technology (B.Tech.), Chemical Engineering
2012 — 2016
University at Buffalo
Doctor of Philosophy (PhD), Chemical and Biological Engineering
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