Oleg Khodykin
Advanced development of metrology and inspection tools
- Role
- Head of Advanced Source Development at 科磊股份有限公司
- Location
- San Francisco, CA, US
- LinkedIn followers
- 500 followers
About Oleg Khodykin
Program and project management.Technical lead of cross-functional teams in the development of N+1, N+2 products.Semiconductor inspection and metrology equipment: reticle inspection, wafer metrology (CD and OVL).IP generation.
Experience
Head of Advanced Source Development
Apr 2011 — Present
Development of next generation reticle inspection and wafer metrology products. Program and project management of EUV mask inspection tool.Manager of EUV source group.
Education
Moscow Institute of Physics and Technology (State University) (MIPT)
Ph.D, Solid State Physics
1994 — 1998
Moscow Institute of Physics and Technology (State University) (MIPT)
M.Sc, Applied Physics and Mathematics
1986 — 1994
Skills
- Lithography
- Powder X-Ray Diffraction
- Patents
- Sputtering
- Vacuum
- Matlab
- Pvd
- Nanofabrication
- Optoelectronics
- R&D
- Algorithms
- Characterization
- Scanning Electron Microscopy
- Spectroscopy
- Plasma Physics
- Silicon
- Physics
- Electronics
- Sensors
- Design of Experiments
- Materials
- Zemax
- Uhv
- Experimental Physics
- Laser Physics
- Mems
- Polymers
- Signal Processing
- Mathematica
- Microscopy
- Nonlinear Optics
- Thin Films
- Photolithography
- Afm
- Optical Engineering
- Materials Science
- Failure Analysis
- Semiconductor Industry
- Metrology
- Simulations
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