Mark Sowa

Plasma Enhanced Atomic Layer Deposition Expert

Role: Owner at Plasma Ald, Llc
Location: Medford, MA, US
LinkedIn followers: 500 followers

Manufacturing & ProductionView LinkedIn profile

About Mark Sowa

Ph.D. chemical engineer with plasma source design and thin film plasma processing…

Experience

Owner
Plasma Ald, Llc
Apr 2025 — Present · Boston, MA, US
Consulting in plasma enhanced atomic layer deposition and adjacent technologies including thermal atomic layer deposition, molecular layer deposition, plasma surface treatments, and plasma source design.Operator of the online plasma enhanced atomic layer deposition publication database at

Education

Princeton University
PhD
University of Illinois Urbana-Champaign
BS

Contact information

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Current company

Plasma Ald, Llc

Semiconductor Manufacturing · 1 employees · Founded 2018 · Medford, Massachusetts, United States

Plasma ALD LLC designs and builds high-performance inductively coupled plasma (ICP) sources and supports their integration into advanced vacuum processing systems. We focus on enabling reliable, controllable plasma generation for applications including atomic layer deposition (ALD), plasma etching, chamber cleaning, and surface preparation. Our systems are engineered for stability, uniformity, and compatibility with existing research and production platforms. Our core capabilities include- ICP plasma source design - Remote and direct plasma configurations - Retrofit and integration into existing ALD, PECVD, and etch systems We specialize in- Adding plasma capability to existing tools - Custom plasma source development - Bridging the gap between experimental plasma setups and robust hardware Our approach is practical and engineering-driven: we build plasma sources that are not only high-performance, but also serviceable, reproducible, and ready for real-world use.

plasma-ald.com

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About Mark Sowa

Experience

Owner

Education

Princeton University

University of Illinois Urbana-Champaign

Find verified contacts for anyone on LinkedIn