Marcel Broekaart
Product Développement Expert at Innovation Department Chez Soitec @Soitec
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WORK HISTORY
Product Développement Expert at Innovation Department Chez Soitec @Soitec
FR
EDUCATION
IHBO Eindhoven
Ing, Natuurkunde
Jansenius Lyceum Hulst
VWO-Beta, BAC science
Eindhoven University of Technology
Ir, TWIM
SKILLS
ABOUT MARCEL BROEKAART
Project Management : CMOS Module development, Process integration/filière, Technologie Roadmap et Transfert, Yield Improvement, Transversal Management, R&D projects with Sematech/IMEC/Leti. Fields: Lithography (up to immersion 193nm technology), Dry Etch and Strip, Patterning, SEMCD, Scatterometry, Defectivity, Electrical Caracterisation, Failure Analyses, Circuit Transfer BSI, Waferbonding, Grinding, Wafer Geometry, Coherence Interferometry, Surface activation. First introduction of scatterometry in the Crolles 2 production line for Poly and STI in the 65 and 45nm technologies. New patterning concepts in BEOL for Dual Damascene architectures with Hardmasks for CMOS090/065/045/032 Crolles-Introduction des nouveaux concepts de patterning en FEOL avec le Carbone Hardmask pour la définition de la Grille et Shallow Trench Isolation pour les technologies CMOS065/045/032-31 Brevets et ± 20 Publications. Spécialisations : Integration expert in SOI and patterning in the semiconductor,
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