Harald Schenk
Professor @Brandenburgische Technische Universität Cottbus-Senftenberg
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WORK HISTORY
Professor @Brandenburgische Technische Universität Cottbus-Senftenberg
EDUCATION
University of Duisburg-Essen
Doctor in electrical engineering, Electrical engineering
The Julius Maximilians University of Würzburg
Diplom (Master equivalent), Physics
Brandenburgische Technische Universität Cottbus-Senftenberg
Habilitation, Physik
SKILLS
ABOUT HARALD SCHENK
Conducting application focused research and development projects in the fields of MEMS and MEMS based systems including design, simulation, process and systems integration as well as product qualification towards pilot fabrication. Special Know-how and experience in micro scanning mirrors (e.g. for projection, metrology and imaging) light modulators (e.g. for lithography, adaptive optics), electrostatic micro and nano actuators (e.g. for micro loudspeakers), MEMS process technology incl. CMOS Integration and MEMS reliability.
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