Guangqing Chen
VP of Engineering Operations
- Role
- VP of Engineering Operations at ASML
- Location
- San Francisco, CA, US
- LinkedIn followers
- 500 followers
About Guangqing Chen
Patents:US 7,499,156 Closed region defect detection system US 7,167,185 Visualization of photomask databases US 7,126,681 Closed region defect detection system US 7,046,352 Surface inspection system and method using summed light analysis of an inspection surface US 7,027,635 Multiple design database layer inspection US 7,488,933 Method for lithography model calibrationUS 9,355,200 Method and apparatus for design of a metrology target US 9,494,874 B2 Method and apparatus for design of a metrology targetWO A1 Method and apparatus for inspection and metrologyUS 10,007,744 B2 Process based metrology target Metrology set-up methods - Fab FlowsUS 11,580,274 B2 METHOD AND APPARATUS FOR INSPECTION AND METROLOGYUS 63/327,337 / E-BEAM OPTIMIZATION FOR OVERLAY MEASUREMENT OF BURIED FEATURES
Experience
VP of Engineering Operations
Jul 2019 — Present
Education
Caltech
PhD, Physics, Computer Science
1989 — 1997
Skills
- Ic
- Semiconductor Industry
- Semiconductors
- Lithography
- Thin Films
- Simulations
- Physics
- Eda
- Photolithography
- Optics
- Metrology
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