Eric Liu
- Role
- Sr Process Development Manager at ASM
- Location
- Tempe, AZ, US
- LinkedIn followers
- 500 followers
About Eric Liu
Sr Process development manager with 20+ years of semiconductor equipment industry…
Experience
Sr Process Development Manager
Jan 2014 — Present
Current Job Responsibilities • Engineer next generation ALD reactor and precursor delivery system • Develop new process: pre-cleaning treatment, SiGe GateOx integration, MIMCap • Drive best known methods for defect management, qualification and reactor lifetime • Key account technical support to top-5 customers • Intellectual property committee Accomplishments • Achieve 5x reactor lifetime by reducing CVD deposition components, reactor re-design and improved reactor assembling procedure • Improve film thickness WIW Range by 50% w/ improved thermal tuning • Achieve PTOR in all top 5 customers
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