Dean Stephens

Deposition Engineering Technologist @Spts Technologies Ltd, A Kla Company

Designed and fabricated hardware for delivery of Cu precursor and other reagents, for novel MOCVD technique. Development of processes for use in same. Depositing copper films using novel, non-fluorinated, precursor, for seed layers. Budgetary control of project. Designed, fabricated and developed MO (metal organic) delivery system for use in PECVD and RP (remote plasma) CVD GaN processing. Working as part of a small, world class, team developed processes for LED processing applications. Contributed to BluGlass (Australia) new IP portfolio for remote plasma growth of low temperature, high purity GaN films.Co-engineered solution for measurement of actual substrate surface temperature, plus/minus 1°C over 13+ hours at 1100°C, through a plasma.